Osmium Plasma Coater

Osmium Plasma Coater

  • Osmium Plasma Coater OPC80T dòng máy phủ mẫu dòng bột Osmium để tạo một lớp hàng dẫn điện nên bề mặt mẫu mà không có những vết nứt như phủ vật liệu Pt, Au như máy phủ thông thường.
  • Mã sản phẩm: OPC80T
  • Xuất xứ: Japan
  • Thương hiệu: Filgen
  • Kho hàng: Có sẵn
  • Khuyến mại: 12 tháng
  • Tài liệu: Tải về
Thêm vào giỏ

Osmium Plasma Coater

Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC glow discharge method to coat conductive thin film mainly for SEM samples.

Benefits of Osmium Plasma Coater

Operability

Osmium Conductive Film

Plasma-Polymerized
Naphthalene Hydrocarbon Film

 

 

 

Simple Automatic Operation
(Only need to set the thickness of the film and then push start button)

Detachable Osmium Reservoir
The sealed structure of the reservoir allows cryopreservation

Easy Confirmation of The Remaining Amount
(A small view port allows confirmation of the remaining amount of the OsO4/naphthalene crystal.)

Short Coating Time
(a few nm/a few seconds)

High Security
(An interlock circuit is equipped.)

No Granule
The osmium thin film is not granular.

The microstructure of the specimen surface can be faithfully molded.
OsO4 will sublimate before coating process.

No Heat Damage
The coating process is at room temperature. Thus, the specimen will not go through a heat process.

No Electron Beam Damage
The melting temperature of Osmium is 2700℃, whick is much higher than the ones of Pt or Pd. So osmium conductive metal coating is not damaged nor deformed by heat when exposed to strong electron beam.

No contamination
In the regative glow phase domain of the DC glow discharge, where only osmium metal molecules are positively ionized, highly concentrated positive ion osmium molecules adhere uniformly, deposit densely and form the thin layer in molecular level on the specimen which is electrically insulate.

Toughness
The film can withstand the gallium ions that used in FIB(Focused Ion Beam) system.

Heat-resistance

Insulation

No Granule
The plasma-polymerized hydrocarbon film is not granular.

The microstructure of the specimen surface can be faithfully molded.
Naphthalene will sublimate before coating process

No Heat Damage
The coating process is at room temperature. Thus, the specimen will not go through a heat process.

No Electron Beam Damage

Principle

A small amount of osmium tetroxide(OsO4)gas / naphthalene gas(C10H18) is introduced into the small gas reaction vessel that equips with an anode plate and a cathode plate.
Then, in the gas reaction vessel, when a DC glow discharge is generated under a thin sublimation gas pressure, the osmium metal molecules excited by the collision of electrons instantaneously become plasma between the two electrodes. The positive column and the negative glow phase are separated, and the blue-violet light of the negative glow phase emits.
At the same time, the positive ion metal molecules instantly adhere to the surface of the specimen, which is placed in the negative glow phase area on the cathode plate, and an osmium metal thin film/plasma-polymerized film(naphthalene) is formed.
With an osmium metal thin film on the surface of the SEM specimen, an extremely clear image can be obtained.

Application

Conductive Ultra-thin Film

Observation of the ultrafine structure of insulators by FE-SEM

Quantitative analysis of top surface of insulators by ESCA or AES
(Auger Electron Spectroscopy)

Enhancement of conductivity for TEM specimen

Static prevention treatment for AFM specimen

Antistatic treatment for STM specimen

Etching(Mixed gas method only)

 

Osmium Thin Film

Conductive thin film for SEM specimen

Prevention of contamination for SEM/TEM specimen

Protective film for AFM specimen

COnductive protective film for SPM specimen

Protective film for SPM cantilever

 

Plasma-polymerized Film

Protective film for FIB specimen

Prevention of peeling between embedding resin and sample

Coating for fluorine resin
(Naphthalene-osmium hybrid coating)

Support film for TEM grid

Drift prevention for ultra-thin sections for TEM

 

 

 

 

 

hông số kỹ thuật chính model OPC80T:

- Buông mẫu: Làm bằng vật liệu thủy tính (glass), 160(φ) x 105(H) mm.

- Kích thước tối đa mẫu: 44(W) x 44(D) x 4(H) mm or 32(φ) x 14(H) mm.

- Gắn được các mẫu SEM kích thước: 10 mmφ x 2 pcs and 15 mmφ x 2 pcs and 32 mmφ x 1 pc..

- Bề dầy lớp phủ: Từ vài Nano tới vài trăm nm.

- Bề dầy lớp phủ có thể set nhỏ nhất: 0.1nm ở chế độ Ultra - thin film mode/ 1nm ở chế độ Normal mode.

- Loại vật liệu phủ: Osmium conductive film, Plasma-polymerized film (napthalene).

- Đặc tính bộ OsO4: Detachable (capable to store in freezer) / Gas port integrated safety locking pin / Observation window / Built-in ampoule cutter.

- Đặc tính bộ Naphthalene: Heater for effective sublimation / Observation window

- Cách đưa khí vào ra: Tự động điều khiển nhờ đầu đo chân không, solenoids và bơm hút chân không.

- Nguồn điện: 100VAC, 1 pha, 50Hz, 12A (bao gồm cả tải của bơm sơ cấp).

- Kích thước:450(w) x 410(D) x 390(H) mm.

- Trọng lượng: 30kg.

- Thông số bơm sơ cấp: Điện áp 100VAC, 50Hz, 550W, 9.0A, tốc độ bơm 200L/min (50Hz), kích thước: 170(W) x 520(L) x 560(H) mm, trọng lượng: 31kg.



 Technical data

 
OPC60A is used to coat conductive film for SEM, FE-SEM specimens.
OPC80T is used to coat conductive film for SEM, FE-SEM specimens and support film for TEM specimens. If you use OPC, you can coat osmium conductive film safety and easily.
You can operate OPC automatically.
As long as you coat osmium of a few nm in a specimen with OPC, the specimen can get enough conductivity. Because osmium conductive film can be coated extremely uniformly.
Besides osmium conductive film is no heat damage.
OPC is epoch-making equipment.
OPC80T can coat not only osmium conductive film but also naphthalene film.
Naphthalene film is non-conductive, so strong, medicine character-resistant, and heat-resistant.
Besides naphthalene film is applied as a support film.
Naphthalene film is also applied as a protective film of specimens for FIB(Focused Ion Beam Equipment).

  ※See various technical data by clicking the following items.


  SEM images
MgO crystals
Rat Liver
Human Lymphocyte
Chicken Leg Tendon
Barium Titanate
Resist Hole
Ant
Silicon Wafer Resist Sample

  Others
Application example of plasma polymerized film
(Protective film for FIB)
Application example of plasma polymerized film
(Silicon under FIB)
Cross sectional TEM image alternately laminated film by Osmium ultra-thin film and plasma polymerized film(naphthalene)
Trench observation of silicon wafer by plasma polymerized film
Conductive ultra-thin film coating mechanism
Hydrophilization treatment by Osmium plasma coater
Naphthalene - Osmium Hybrid coating

 

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