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- Osmium Plasma Coater
- Mã sản phẩm: OPC80T
- Xuất xứ: Japan
- Hãng sản xuất: Filgen
- Bảo hành: 12 tháng
- Trạng thái: Đặt hàng
- Osmium Plasma Coater OPC80T dòng máy phủ mẫu dòng bột Osmium để tạo một lớp hàng dẫn điện nên bề mặt mẫu mà không có những vết nứt như phủ vật liệu Pt, Au như máy phủ thông thường.Hotline: 02439942289
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Osmium Plasma Coater
Osmium Plasma Coater(OPC) is the plasma coating device that uses the DC glow discharge method to coat conductive thin film mainly for SEM samples.
Benefits of Osmium Plasma Coater
Operability
Osmium Conductive Film
Plasma-Polymerized
Naphthalene Hydrocarbon Film●
Simple Automatic Operation
（Only need to set the thickness of the film and then push start button）●
Detachable Osmium Reservoir
The sealed structure of the reservoir allows cryopreservation●
Easy Confirmation of The Remaining Amount
（A small view port allows confirmation of the remaining amount of the OsO4/naphthalene crystal.)●
Short Coating Time
（a few nm/a few seconds）●
High Security
（An interlock circuit is equipped.）●
No Granule
The osmium thin film is not granular.●
The microstructure of the specimen surface can be faithfully molded.
OsO4 will sublimate before coating process.●
No Heat Damage
The coating process is at room temperature. Thus, the specimen will not go through a heat process.●
No Electron Beam Damage
The melting temperature of Osmium is 2700℃, whick is much higher than the ones of Pt or Pd. So osmium conductive metal coating is not damaged nor deformed by heat when exposed to strong electron beam.●
No contamination
In the regative glow phase domain of the DC glow discharge, where only osmium metal molecules are positively ionized, highly concentrated positive ion osmium molecules adhere uniformly, deposit densely and form the thin layer in molecular level on the specimen which is electrically insulate.●
Toughness
The film can withstand the gallium ions that used in FIB(Focused Ion Beam) system.●
Heat-resistance
●
Insulation
●
No Granule
The plasma-polymerized hydrocarbon film is not granular.●
The microstructure of the specimen surface can be faithfully molded.
Naphthalene will sublimate before coating process●
No Heat Damage
The coating process is at room temperature. Thus, the specimen will not go through a heat process.●
No Electron Beam Damage
Principle
A small amount of osmium tetroxide(OsO4)gas / naphthalene gas(C10H18) is introduced into the small gas reaction vessel that equips with an anode plate and a cathode plate.
Then, in the gas reaction vessel, when a DC glow discharge is generated under a thin sublimation gas pressure, the osmium metal molecules excited by the collision of electrons instantaneously become plasma between the two electrodes. The positive column and the negative glow phase are separated, and the blue-violet light of the negative glow phase emits.
At the same time, the positive ion metal molecules instantly adhere to the surface of the specimen, which is placed in the negative glow phase area on the cathode plate, and an osmium metal thin film/plasma-polymerized film(naphthalene) is formed.
With an osmium metal thin film on the surface of the SEM specimen, an extremely clear image can be obtained.Application
Conductive Ultra-thin Film
●
Observation of the ultrafine structure of insulators by FE-SEM
●
Quantitative analysis of top surface of insulators by ESCA or AES
(Auger Electron Spectroscopy)●
Enhancement of conductivity for TEM specimen
●
Static prevention treatment for AFM specimen
●
Antistatic treatment for STM specimen
●
Etching(Mixed gas method only)
Osmium Thin Film
●
Conductive thin film for SEM specimen
●
Prevention of contamination for SEM/TEM specimen
●
Protective film for AFM specimen
●
COnductive protective film for SPM specimen
●
Protective film for SPM cantilever
Plasma-polymerized Film
●
Protective film for FIB specimen
●
Prevention of peeling between embedding resin and sample
●
Coating for fluorine resin
(Naphthalene-osmium hybrid coating)●
Support film for TEM grid
●
Drift prevention for ultra-thin sections for TEM
hông số kỹ thuật chính model OPC80T:
- Buông mẫu: Làm bằng vật liệu thủy tính (glass), 160(φ) x 105(H) mm.
- Kích thước tối đa mẫu: 44(W) x 44(D) x 4(H) mm or 32(φ) x 14(H) mm.
- Gắn được các mẫu SEM kích thước: 10 mmφ x 2 pcs and 15 mmφ x 2 pcs and 32 mmφ x 1 pc..
- Bề dầy lớp phủ: Từ vài Nano tới vài trăm nm.
- Bề dầy lớp phủ có thể set nhỏ nhất: 0.1nm ở chế độ Ultra - thin film mode/ 1nm ở chế độ Normal mode.
- Loại vật liệu phủ: Osmium conductive film, Plasma-polymerized film (napthalene).
- Đặc tính bộ OsO4: Detachable (capable to store in freezer) / Gas port integrated safety locking pin / Observation window / Built-in ampoule cutter.
- Đặc tính bộ Naphthalene: Heater for effective sublimation / Observation window
- Cách đưa khí vào ra: Tự động điều khiển nhờ đầu đo chân không, solenoids và bơm hút chân không.
- Nguồn điện: 100VAC, 1 pha, 50Hz, 12A (bao gồm cả tải của bơm sơ cấp).
- Kích thước:450(w) x 410(D) x 390(H) mm.
- Trọng lượng: 30kg.
- Thông số bơm sơ cấp: Điện áp 100VAC, 50Hz, 550W, 9.0A, tốc độ bơm 200L/min (50Hz), kích thước: 170(W) x 520(L) x 560(H) mm, trọng lượng: 31kg.
Technical data
OPC60A is used to coat conductive film for SEM, FE-SEM specimens.
OPC80T is used to coat conductive film for SEM, FE-SEM specimens and support film for TEM specimens. If you use OPC, you can coat osmium conductive film safety and easily.
You can operate OPC automatically.
As long as you coat osmium of a few nm in a specimen with OPC, the specimen can get enough conductivity. Because osmium conductive film can be coated extremely uniformly.
Besides osmium conductive film is no heat damage.
OPC is epoch-making equipment.
OPC80T can coat not only osmium conductive film but also naphthalene film.
Naphthalene film is non-conductive, so strong, medicine character-resistant, and heat-resistant.
Besides naphthalene film is applied as a support film.
Naphthalene film is also applied as a protective film of specimens for FIB(Focused Ion Beam Equipment).
※See various technical data by clicking the following items.
SEM images
● MgO crystals ● Rat Liver ● Human Lymphocyte ● Chicken Leg Tendon ● Barium Titanate ● Resist Hole ● Ant ● Silicon Wafer Resist Sample
Others
● Application example of plasma polymerized film
(Protective film for FIB)● Application example of plasma polymerized film
(Silicon under FIB)● Cross sectional TEM image alternately laminated film by Osmium ultra-thin film and plasma polymerized film(naphthalene) ● Trench observation of silicon wafer by plasma polymerized film ● Conductive ultra-thin film coating mechanism
Hydrophilization treatment by Osmium plasma coater● Naphthalene - Osmium Hybrid coating 
Product Lineup
Standard Models
Osmium film Only Model
OPC60A
Excellent repeatability in producing Osmium thin film of several nm to several hundred nm.
Osmium film / Plasma-Polymerized film Dual-use model
OPC80T
Excellent repeatability in producing Osmium thin film of several nm to several hundred nm.
OPC80T can also produce plasma polymerized film.
Model with option mechanism
Conductive ultra-thin film mechanism
Excellent repeatability in producing Osmium thin film of 0.5～3 nm.
This model can also be used for producing Osmium thin film of standard thickness.
◎ Low current method
◎ Mixed gas method
Hydrophilization treatment mechanism
By performing a hydrophilization treatment, it can improve the adhesion between the Osmium thin film and the specimen surface.
This model can also be used for producing standard Osmium thin film.
Deep sample mechanism
This model can coat a sample that is 30 mm higher than standard sample.
This model can also be used for producing standard Osmium thin film.
Custom-made unit
Simple draft hood＋exhaust unit
Since the Osmium Plasma Coater already has through safety measures against Osmium tetroxide, this custom-made unit is not necessary indeed.
For customers who require further safety measures, the "simple draft hood"＋exhaust unit" can be ordered.
The exhaust unit equips with a pre-filter, a HEPA filter, an activated carbon filter, and an original OsO4 filter that developed by us.
The exhaust gas of the rotary pump can also be connected.
Please contact us for details.
Osmium Plasma Coater (OPC) is the plasma coating device that uses the D.C. glow discharge method to coat conductive thin film mainly for SEM samples.
Conductive ultra-thin film mechanism
Conductive ultra thin film deposition mechanism can be optionally installed on standard type.
In addition, it is possible to attach an option to a device(compatible model) that has already been used.
Optional mounting is possible with the following 3 patterns.
・Low current system only
・Mixed gas system only
・Both Low current system and Mixed gas system
The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time.
In addition, the external dimensions and weight of the main unit change with the optional installation.
（Please contact us for details.）
The film forming method used for the conductive thin film mechanism is patented by 「Filgen, Inc.」.
Patent
nameConductive ultra thin film mechanism
(low current method)Patent
numberNo. 5419723 Title of
inventionPlasma film forming method of conductive thin film 
Comparison of 「Both Low current system and Mixed gas system」 mounting type
and 「Low current system」 mounting type
OPC80T-LM equipped with
both Low current system and Mixed gas systemOPC80T-L equipped with
Low current system
The OPC80T-LM is a standard type of Osmium plasma coater with a Low current system and Mixed gas system additionally installed.
Anyone can use the OPC80T-LM to reproducibly deposit about 0.5 to 3nm of ultra-thin osmium film.
You can also deposit without opotion systems.
The OPC80T-L is standard type of Osmium plasma coater with a low current system additionally installed.
Anyone can use the OPC80T-LM to reproducibly deposit about 0.5 to 3nm of ultra-thin osmium film.
You can also deposit without opotion systems.
⇒Technical data「Osmium ultra thin film-Cross-sectional image of plasma-polymerized film by TEM」
Low current system and Mixed gas system
●Low current system The low current system uses the method of forming a film with a low discharge current using a method of applying a voltage from a high vacuum state where the concentration of OsO4 gas is low and glow discharge does not start. ●Mixed gas system The mixed gas system reduces the concentration of OsO4 gas by mixing an inert gas into the OsO4 gas, and facilitates the control of ultra thin film deposition by reducing the deposition growth rate.
It is also possible to discharge using only inert gas, and it has scalability to applications such as etching.
Price
【Price When installing an optional mechanism at the same time as purchasing a new divice】
Optional mechanism Compatible models Model name
after mounting optionPrice Low current system
of conductive ultra thin film mechanismOPC80T OPC80T-L Ask for a quote OPC60A OPC60A-L Ask for a quote Mixed gas system
of conductive ultra thin film mechanismOPC80T OPC80T-M Ask for a quote Both Low current system
and Mixed gas system
of conductive ultra thin film mechanismOPC80T OPC80T-LM Ask for a quote ※ The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time.
【Price when installing the optional mechanism on the device already delivered】
Optional mechanism Compatible models Model name
after mounting optionPrice Low current system
of conductive ultra thin film mechanismOPC80/OPC80T OPC80-L/OPC80T-L Ask for a quote OPC60/OPC60A OPC60-L/OPC60A-L Ask for a quote Mixed gas system
of conductive ultra thin film mechanismOPC80/OPC80T OPC80-M/OPC80T-M Ask for a quote Both Low current system
and Mixed gas system
of conductive ultra thin film mechanismOPC80/OPC80T OPC80-LM/OPC80T-LM Ask for a quote ※ The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time. ※ If you want to add an optional mechanism to the delivered device, we will send you a cardboard or alminum case for packing. Please put it in and send it back. ※ The above prices do not include shipping charges. Hydrophilization treatment mechanism
Hydrophilization treatment mechanism can be optionally installed on standard type.
In addition, it is possible to attach an option to a device(compatible model) that has already been used.
The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time.
In addition, the external dimensions and weight of the main unit change with the optional installation.
（Please contact us for details.）
By performing a hydrophilization treatment, it is possible to form a highly adhesive osmium thin film on the sample surface.
You can also deposit without opotion systems.
⇒ Technical data「Hydrophilization treatment with osmium plasma coater」 
Appication
◆ Pre-hydrophilization treatment for osmium coating on fluoro resin surface etc. ◆ Peeling prevention between embedding resin and data ◆ Hydrophilization of the support film surface for TEM ◆ Hydrophilization of grids for TEM ◆ Hydrophilization of the cutting edge of a diamond knife for ultramicrotome ◆ Improved wettability
Price
【Price When installing an optional mechanism at the same time as purchasing a new divice】
Optional mechanism Compatible models Model name
after mounting optionPrice Hydrophilization treatment mechanism OPC80T OPC80T-H Ask for a quote OPC60A OPC60A-H Ask for a quote ※ The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed at the same time.
【Price when installing the optional mechanism on the device already delivered】
Optional mechanism Compatible models Model name
after mounting optionPrice Hydrophilization treatment mechanism OPC80/OPC80T OPC80-H/OPC80T-H Ask for a quote OPC60/OPC60A OPC60-H/OPC60A-H Ask for a quote ※ The Mixed gas system of the conductive ultra-thin film mechanism and the hydrophilization treatment mechanism can not be installed simultaneously, but it is possible to hydrophilize with the Mixed gas system of the conductive ultra-thin film mechanism. ※ If you want to add an optional mechanism to the delivered device, we will send you a cardboard or alminum case for packing. Please put it in and send it back. Deep sample mechanism
Deep sample mechanism can be optionally installed on standard type.
In addition, it is possible to attach an option to a device(compatible model) that has already been used.
When the deep sample mechanism is optionally attached to the standard type, the OPC60A can be used for samples up to 36mmφ×44mm(H), and the OPC80T can be used for samples 46mmφ×44mm(H).
The external dimensions and weight of the main unit change with the optional installation.（Please contact us for details.）
Comparison of Deep sample mechanism mounted type and Standard type cathode plates
Deep sample mechanism mounted type
OPC60A-GStandards type
OPC60A
Enlarged picture of the electrode part of OPC60AG（Deep sample mechanism mounting type）
Supports up to 36mmφ×44mm(H) samples
Enlarged picture of the electrode part of OPC60A(standard type)
Supports up to φ×14mm(H)
Price
【Price When installing an optional mechanism at the same time as purchasing a new divice】
Optional mechanism Compatible models Model name
after mounting optionPrice Deep sample mechanism OPC80T OPC80T-G Ask for a quote OPC60A OPC60A-G Ask for a quote
【Price when installing the optional mechanism on the device already delivered】
Optional mechanism Compatible models Model name
after mounting optionPrice Deep sample mechanism OPC80/OPC80T OPC80-G/OPC80T-G Ask for a quote OPC60/OPC60A OPC60-G/OPC60A-G Ask for a quote ※ If you want to add an optional mechanism to the delivered device, we will send you a cardboard or alminum case for packing. Please put it in and send it back. Accessories
Osmium reservoir transport container
This is a dedicated transport container for the Osmium reservoir.
・All stainless steel
・High air-tightness (0.02Mpa in pressure test)
・Specially designed cushioning material that firmly covers the reservoir.
・Dual-use for transportation and strage
The packing procedure is easy as follows.
※The cushioning material needs to be replaced regularly.
①Put the reservoir into the transport container. ②Cover the reservoir with the cushioning material. ③Close the lid with 10 screws.
Product Reservoir transport container Model RVT-1 Dimension 198(W)×118(L)×102(H)mm Weight 2.2kg Price Ask for a quote
Dedicated vacuum grease for O-ring（0.5ml）
The vacuum grease for the O-ring of the Osmium plasma coater.
・It has excellent durability against highly reactive gases such as Osmium tetroxide and Ruthenium tetroxide.
・It can be used for O-ring replacement and movable parts of the reservoir.
Product Vacuum grease for O-ring (0.5ml) Model VS-GR Price Ask for a quote 
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