EPS150 COAX / COAXPLUS Overview

Perform Fundamental I-V / C-V Measurements

DC parametric test solution with an optimized signal path down to pA levels to ensure fast, accurate ultra-low-level measurements over temperature. An intuitive operation workflow ensures ease of operation for both the novice and the expert user.

Applications: IV/CV

EPS150 COAX / COAXPLUS Key Features

Movable Platen

• 40 mm height adjustment
• 200 μm contact / separation stroke
• ± 1 μm repeatability
• Probe-to-pad alignment without losing focus
• Consistent contact force and overtravel
• Easy to switch between wafers, packages and DUT boards

Chuck Stage

• Adjustable friction & stage lock
• Unique Z chuck adjustment
• 90 mm pull-out
• Convenient operation
• More flexibility in adjustment
• Fast and safe wafer loading with probes or probe card

Magnetic Positioner

• 100 TPI with 2 μm accuracy
• Industry-standard
• 3 linear axes with precision ball bearing
• High positioning accuracy
• Proven quality standards
• Fast and precise positioning