EPS150TRIAX Overview

Investigate Sensitive Device Measurements

I-V/C-V measurement solution down to fA levels with an optimized full triaxial design in an ideally quiet and dry environment. Low noise chucks with Kelvin connections, as well as triaxial probe arms and cables, deliver a high degree of measurement confidence.

Applications: IV/CV

EPS150TRIAX Key Features

Stereo Microscope

• Stereo zoom
• 15x–100x magnification with large field-of-view
• Camera ready c-mount
• Precise 3D navigation
• Easy navigation and precision positioning
• Camera upgrade for documentation

Optimized TRIAX Design

• High-quality triax cables
• Four triax probe arm
• Light/EMI shielding (optional)
• Measurement results with maximum noise reduction
• Perfectly adjusted setup
• Upgrade option for fF-level measurements

TRIAX Chuck

• ±8 fine theta chuck rotation
• Three auxiliary areas
• Chuck surface with ±5 μm planarity
• East/West to North/South measurements with single setup
• Easy to move from DUTs to calibration and cleaning substrates
• Consistent contact force and overtravel